high vacuum semiconductor applications
 
high performance lubrication
TorrLube, high vacuum semiconductor applications, semiconductor lubricant, valve and O-ring seals lubricant
high performance lubrication
 
high vacuum semiconductor applications
TorrLube

valve and O-ring seals lubricant

Tec-Lube

Vapor Pressure: @ 38° C
@ 260° C

6x10-9 torr
3x10-4 torr
Viscosity: @ 38° C
@ 99° C		 500 centistokes
43 centistokes
Viscosity Index, ASTM D2270:   144
Flammability:   DOES NOT BURN
Surface tension: @ 26° C 19.5 dyn/ cm
Density: @ 100° C 1.78
Chemical Inertness:   No reactivity

Tec-Lube shows remarkable chemical inertness. No evidence of reactivity was observed between Tec-Lube and boiling sulfuric acid, fluorine gas at 200° C, chlorine trifluoride at 10-50° C, molten sodium hydroxide or any of the following at room temperature: ethyl alcohol, hydrazine, aniline or nitrogen tetroxide.

Tec-Lube does not interact to contaminate semiconductor devices being processed in a system with free radicals such as NA++.

  
high performance lubrication
torrlube
 
 


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