Tec-Lube 1 cc Syringe
Tec-Lube 2 x 60 cc Bottles

Tec-Lube Specifications

Tec-Lube

Tec-Lube is the ideal lubricant for use in high vacuum semiconductor applications. Tec-Lube offers a low outgassing rate, chemical inertness and non-flammability. Tec-Lube is an excellent lubricant under severe operating conditions. Tec-Lube performs well under heavy loads, at high speeds and at elevated temperatures.

Tec-Lube provides superior lubrication for valve and O-ring seals, bearing surfaces, and rotating or sliding vacuum components under extreme operating conditions.

Exceptional chemical inertness

Tec-Lube shows remarkable chemical inertness. No evidence of reactivity was observed between Tec-Lube and boiling sulfuric acid, fluorine gas at 200^o C, chlorine trifluoride at 10-50^o C, molten sodium hydroxide or any of the following at room temperature: ethyl alcohol, hydrazine, aniline or nitrogen tetroxide.

Tec-Lube does not interact to contaminate semiconductor devices being processed in a system with free radicals such as NA++.

A clean solution

Tec-Lube is a lubricant you can depend on. Tec-Lube is put into syringes and bottles using clean room criteria. It is shipped in clean packages, with no leaks, no contaminants.

Choose from a variety of sizes

Tec-Lube is available in a 1cc syringe for small applications such as research, prototyping or small-scale manufacturing or in 60cc bottles for larger scale manufacturing.